 zhouhr
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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10 months ago |
 chenkui
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774c804aa9
fixed pm event occurs carrierid is null
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1 year ago |
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chenkui
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25f21eaf52
1、fixed PortWaferStart notify event parameter carrierId is null
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1 year ago |
|
chenkui
|
cc41474996
1、add WaferStart sequenceId information
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1 year ago |
|
chenkui
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7dc2089ceb
1、add PortWaferStart/PortWaferEnd event sequence name parameter;
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1 year ago |
|
chenkui
|
563a30f852
1、add recipe event notify;
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1 year ago |
|
chenkui
|
2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
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1 year ago |
|
chenkui
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8bb5f3f4f9
fixed loadport event notify;
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1 year ago |
|
chenkui
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
|
zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
 Intern01
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60e9a04892
Simulator LP3 Update
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1 year ago |
|
Intern01
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c8473cb60c
1.增加Fa模块事件上报相关接口FaEvet，与recipejob,loadportjob事件上报接口
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1 year ago |
