 lixiang
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f92e6abb17
1.添加Kepler2300 功能代码
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6 months ago |
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lixiang
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10c22069fe
1.添加EFEM光栅报警开关
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9 months ago |
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lixiang
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3dd6dc62ed
修复OperationView PM显示错误bug
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11 months ago |
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lixiang
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17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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11 months ago |
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lixiang
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33d0cd73dd
1.修复Pump Counter 显示错误bug
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11 months ago |
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lixiang
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b67769ec2c
ui优化
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11 months ago |
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lixiang
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9163903164
Kepler2200优化
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1 year ago |
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lixiang
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c671c999c0
ui界面优化
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1 year ago |
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lixiang
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d33079596b
1.优化新版跑片动画
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1 year ago |
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lixiang
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7513d2e586
TM View 添加wafer
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1 year ago |
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lixiang
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8d613c7d1f
奈思UI 新版动画
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1 year ago |
 hecl
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6c7190339c
Fix exception caused by OperationOverView,TMOperationView,TopView,TMView
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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lixiang
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b1e6a9ce63
bug提交
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1 year ago |
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lixiang
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ad6fa7b5dc
1.添加chamber界面创建wafer，开关门功能
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1 year ago |
 zhouhr
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883eb268eb
add TM Robot Home && delete PrefixPath of the selected recipe in sequence
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1 year ago |
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lixiang
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5888197193
1.efem 添加 foup load/unload动画
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1 year ago |
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lixiang
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b6acfe2e29
优化TM leak check功能
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1 year ago |
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lixiang
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edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
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2 years ago |
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lixiang
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4ffafb6001
EFEM界面优化
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2 years ago |
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lixiang
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bdec2c0d74
1.修改TM robot模拟器
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2 years ago |
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lixiang
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dbf06a2134
添加TM Operation界面
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2 years ago |
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lixiang
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3a078d515d
1.修复ui灯闪烁错误bug
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2 years ago |
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lixiang
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6dd42b5fb0
添加process数据分析功能
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2 years ago |
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lixiang
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530ddcbae7
优化topview界面
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2 years ago |
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lixiang
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3be4fea304
优化传片动画
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2 years ago |
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lixiang
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9231cab4b9
1.修改topView ui
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2 years ago |
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lixiang
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7419cea99a
添加TMCycle动画（部分）
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2 years ago |
