 lixiang
|
10c22069fe
1.添加EFEM光栅报警开关
|
8 months ago |
|
lixiang
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
|
11 months ago |
 zhouhr
|
3838ce8c36
1. Change the logic of Reset RF/Pump/CustomItem count
|
11 months ago |
|
zhouhr
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
|
11 months ago |
|
lixiang
|
99d939492e
1.加登出界面
|
11 months ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
1 year ago |
 hecl
|
4109b056f2
Fix exception caused by skypump recivemessage length && socket don't connect
|
1 year ago |
 chenkui
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 year ago |
 sangwq
|
ec2f97e62d
enhance log.
|
1 year ago |
|
lixiang
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
2 years ago |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 years ago |
|
sangwq
|
2b930e56b9
Log output for exception.
|
2 years ago |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 years ago |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 years ago |
|
sangwq
|
3f9c41937a
update for event module enhancement
|
2 years ago |
|
lixiang
|
896c7407de
优化log功能
|
2 years ago |
|
sangwq
|
9760d40cf7
port simulator
|
2 years ago |
|
sangwq
|
3cad102221
更新 RT
|
2 years ago |
