 lixiang
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a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
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9 months ago |
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lixiang
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ca702b093b
1.alarm List 收集到300+条，并添加到程序里
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10 months ago |
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lixiang
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8e660cd7a8
1.去除carrierid ;字符
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10 months ago |
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lixiang
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d6b8d32004
1.修复不能跑atm模式的bug
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10 months ago |
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lixiang
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a9d8e56970
1.扩展alarm list
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10 months ago |
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lixiang
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b67769ec2c
ui优化
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11 months ago |
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lixiang
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99d939492e
1.加登出界面
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1 year ago |
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lixiang
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652daaa81a
cycle uncheck bug修复
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1 year ago |
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lixiang
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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1 year ago |
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lixiang
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5ce110574e
1，添加cooling功能
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1 year ago |
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lixiang
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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1 year ago |
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lixiang
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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1 year ago |
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lixiang
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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1 year ago |
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lixiang
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9163903164
Kepler2200优化
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1 year ago |
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lixiang
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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1 year ago |
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lixiang
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464c53cd94
1.Datalog添加高温Haeter开关显示
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1 year ago |
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lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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1 year ago |
 hecl
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f814cf53a8
1.Add simulator read RF ConfigType function
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1 year ago |
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lixiang
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3e00375ce8
1.FDC代码逻辑移到PricessDefine
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1 year ago |
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lixiang
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01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
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1 year ago |
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lixiang
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552d60ca99
1.Stable与Tolerance 功能优化
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1 year ago |
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lixiang
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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1 year ago |
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lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
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hecl
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8b0b067448
Add chamber ISO valve status
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1 year ago |
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lixiang
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d35b997884
1.优化RevtechMatch状态机
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1 year ago |
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lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
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lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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lixiang
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af631c4aaa
1.添加RF Calibration功能
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1 year ago |
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lixiang
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96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
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1 year ago |
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lixiang
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e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
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1 year ago |
