lixiang
|
10c22069fe
1.添加EFEM光栅报警开关
|
9 months ago |
lixiang
|
a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
|
9 months ago |
lixiang
|
7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
|
10 months ago |
lixiang
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
|
11 months ago |
zhouhr
|
3838ce8c36
1. Change the logic of Reset RF/Pump/CustomItem count
|
1 year ago |
zhouhr
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
|
1 year ago |
lixiang
|
5ce110574e
1,添加cooling功能
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1 year ago |
lixiang
|
75dbbd4da8
添加KeplerSignaltower功能
|
1 year ago |
lixiang
|
be22c5112d
TM 添加两个pump 串口23/24/25/26
|
2 years ago |
lixiang
|
7a6556869f
1.整理主界面UI
|
2 years ago |
sangwq
|
3f8df8cade
DEVICE UPDATE
|
2 years ago |
sangwq
|
2b930e56b9
Log output for exception.
|
2 years ago |
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 years ago |
lixiang
|
896c7407de
优化log功能
|
2 years ago |
sangwq
|
9760d40cf7
port simulator
|
2 years ago |
sangwq
|
3cad102221
更新 RT
|
2 years ago |