 hecl
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9d28f8ee7d
1.Add Tru match
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1 year ago |
 lixiang
|
01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
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1 year ago |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 year ago |
|
lixiang
|
4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
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1 year ago |
|
lixiang
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
|
lixiang
|
87f1121180
1.Recipe UI 界面Name优化
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1 year ago |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 year ago |
|
lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 year ago |
|
lixiang
|
818383115c
UI优化
|
1 year ago |
 zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
|
1 year ago |
|
lixiang
|
c0ff9f251e
1.添加kepler2200B
|
1 year ago |
|
lixiang
|
e511d1f387
1.添加PM控压功能
|
1 year ago |
|
lixiang
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
1 year ago |
|
lixiang
|
62feaac5e7
1.优化跑片动画
|
2 years ago |
|
lixiang
|
894ff76d5e
online/offline tobview状态颜色变化
|
2 years ago |
|
lixiang
|
a2426eb90b
Recipe 添加bias step ramp设值功能
|
2 years ago |
|
lixiang
|
0af54acc48
Recipe 每个模块做成ui可配，设计clean recipe模块，Kepler2200 模拟器recipe工艺测试
|
2 years ago |
|
lixiang
|
5139f41e19
添加PM Abort 下拉菜单功能
|
2 years ago |
|
lixiang
|
649ac00032
添加rfmatch/biasrfmatch自动计算c1/c2功能
|
2 years ago |
|
lixiang
|
20cc441578
1.kepler2200 ui优化
|
2 years ago |
|
lixiang
|
3f6c65223f
1.删除部分不需要插入数据库数据
|
2 years ago |
|
lixiang
|
b5616b7378
解决冲突，合并代码
|
2 years ago |
|
lixiang
|
b6acfe2e29
优化TM leak check功能
|
2 years ago |
|
lixiang
|
72ac29dac2
1.优化PMC Kepler2200A界面
|
2 years ago |
|
lixiang
|
b96ac701fb
1.添加TM Simulator
|
2 years ago |
