 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 vuosi sitten |
|
hecl
|
d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
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1 vuosi sitten |
 zhouhr
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c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
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1 vuosi sitten |
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zhouhr
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 vuosi sitten |
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zhouhr
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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1 vuosi sitten |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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1 vuosi sitten |
