 lixiang
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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hai 1 ano |
|
lixiang
|
9faf7dc26a
拉取代码软件报警，去除默认Aligner1
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hai 1 ano |
|
lixiang
|
464c53cd94
1.Datalog添加高温Haeter开关显示
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hai 1 ano |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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hai 1 ano |
 sangwq
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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hai 1 ano |
|
lixiang
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caba8d94c6
Duplicated Wafer UI显示
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hai 1 ano |
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sangwq
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2de3872723
duplicated wafer function.
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hai 1 ano |
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sangwq
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52349cad2b
Duplicated wafer functions.
|
hai 1 ano |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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hai 1 ano |
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sangwq
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236244c8a0
redesign wtw clean function and fix auto vent bug.
|
hai 1 ano |
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sangwq
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03063bae6a
Enhance the routine framework.
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%!s(int64=2) %!d(string=hai) anos |
 zhouhr
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37bbeb95df
Add the configuration item QueryAWCOption to determine whether TMRobot AWC collects data && Add TMRobot Pick query AWC
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%!s(int64=2) %!d(string=hai) anos |
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sangwq
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8f9b95ae8f
Develop transfer cycle.
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%!s(int64=2) %!d(string=hai) anos |
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lixiang
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072e5d0d01
ui Module TM 名变TMRobot
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%!s(int64=2) %!d(string=hai) anos |
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sangwq
|
8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
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%!s(int64=2) %!d(string=hai) anos |
|
sangwq
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ed992dd631
Enhance the Log Info
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%!s(int64=2) %!d(string=hai) anos |
|
sangwq
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b741650da1
TM Cycle ready.
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%!s(int64=2) %!d(string=hai) anos |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
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%!s(int64=2) %!d(string=hai) anos |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
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%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
44ec74603f
TM Transfer
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%!s(int64=2) %!d(string=hai) anos |
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sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
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%!s(int64=2) %!d(string=hai) anos |
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sangwq
|
b8bd250b4e
TM/LL Pump/Vent/Purge done.
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%!s(int64=2) %!d(string=hai) anos |
