 zhouhr
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
10 月之前 |
|
zhouhr
|
253fcb8be2
add CassetteArrive,CurrentSlot in UI,RT,Simulator
|
10 月之前 |
|
zhouhr
|
3c1ae4babb
add abort for VenusDE && fix bug in UI && add AbortJob,StopJob
|
11 月之前 |
|
zhouhr
|
6cd541ac40
fix the bug in SE Pick/Place Routine
|
11 月之前 |
|
zhouhr
|
cc04adb731
change the location of the PA from VPA to Aligner1
|
11 月之前 |
|
zhouhr
|
d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
|
11 月之前 |
|
zhouhr
|
0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
|
11 月之前 |
|
zhouhr
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
|
11 月之前 |
|
zhouhr
|
13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
|
11 月之前 |
 hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 年之前 |
|
zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 年之前 |
|
zhouhr
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
|
1 年之前 |
|
zhouhr
|
9d9b666ea4
Venus SE Update
|
1 年之前 |
|
zhouhr
|
e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
|
1 年之前 |
|
zhouhr
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
|
1 年之前 |
|
zhouhr
|
5a2ac08f6f
fix bug in MoveWafer Dialog && SEMFPickRoutine
|
1 年之前 |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 年之前 |
|
zhouhr
|
08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
|
1 年之前 |
|
zhouhr
|
b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
|
1 年之前 |
