 kuangzl
|
eaf2ce039b
Added PMChamberLabel display for VenusDE and VenusSE.
|
10 months ago |
|
kuangzl
|
7631216206
Improve the animation of SE Robot, modify Venus SE UI, complete casette load animation.
|
10 months ago |
|
kuangzl
|
f56adfe739
Upload missing code and remove the PM pressure display.
|
10 months ago |
|
kuangzl
|
a971969e35
Modify the UI of VenusDE and fix the ReturnWafer Button.
|
10 months ago |
|
kuangzl
|
cfd9253e8a
Modified the style of the venusDE page and added the DERobot movement.
|
10 months ago |
 lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
 zhouhr
|
c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
|
1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 year ago |
|
zhouhr
|
cf4cf64edc
Optimize SEView.
|
1 year ago |
|
zhouhr
|
a5ba0d3c6b
add Process in PMChamber for SEOpertaion
|
1 year ago |
|
lixiang
|
e511d1f387
1.添加PM控压功能
|
1 year ago |
|
lixiang
|
b6acfe2e29
优化TM leak check功能
|
1 year ago |
|
lixiang
|
edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
|
1 year ago |
|
lixiang
|
4ffafb6001
EFEM界面优化
|
1 year ago |
|
lixiang
|
dbf06a2134
添加TM Operation界面
|
1 year ago |
|
lixiang
|
2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
|
1 year ago |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 years ago |
|
lixiang
|
39fe214261
1.完善PartialPressure 功能
|
2 years ago |
|
lixiang
|
7299abbcd2
1.优化TM界面
|
2 years ago |
|
lixiang
|
b6c2517c51
1.添加加热功能
|
2 years ago |
