 lixiang
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f92e6abb17
1.添加Kepler2300 功能代码
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9 months ago |
|
lixiang
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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1 year ago |
|
lixiang
|
10c22069fe
1.添加EFEM光栅报警开关
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1 year ago |
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lixiang
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
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1 year ago |
 zhouhr
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3838ce8c36
1. Change the logic of Reset RF/Pump/CustomItem count
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1 year ago |
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zhouhr
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3aee4d6673
1. Add the function of StatsDataManager in UI,RT
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1 year ago |
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lixiang
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99d939492e
1.加登出界面
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1 year ago |
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lixiang
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5ce110574e
1，添加cooling功能
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1 year ago |
 hecl
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4109b056f2
Fix exception caused by skypump recivemessage length && socket don't connect
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1 year ago |
 chenkui
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
 sangwq
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ec2f97e62d
enhance log.
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1 year ago |
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lixiang
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
2 years ago |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 years ago |
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sangwq
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2b930e56b9
Log output for exception.
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2 years ago |
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sangwq
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630c7b7548
Wafer transfer routine done.
|
2 years ago |
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sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 years ago |
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sangwq
|
3f9c41937a
update for event module enhancement
|
3 years ago |
|
lixiang
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896c7407de
优化log功能
|
3 years ago |
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sangwq
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9760d40cf7
port simulator
|
3 years ago |
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sangwq
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3cad102221
更新 RT
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3 years ago |
