 lixiang
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e511d1f387
1.添加PM控压功能
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1 year ago |
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lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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lixiang
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ab095ba2a8
修复钟摆阀状态错误bug
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2 years ago |
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lixiang
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894ff76d5e
online/offline tobview状态颜色变化
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2 years ago |
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lixiang
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a2426eb90b
Recipe 添加bias step ramp设值功能
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2 years ago |
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lixiang
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0af54acc48
Recipe 每个模块做成ui可配，设计clean recipe模块，Kepler2200 模拟器recipe工艺测试
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2 years ago |
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lixiang
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5139f41e19
添加PM Abort 下拉菜单功能
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2 years ago |
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lixiang
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edb5ad6960
1.添加数据分析 Recipe step功能
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2 years ago |
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lixiang
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649ac00032
添加rfmatch/biasrfmatch自动计算c1/c2功能
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2 years ago |
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lixiang
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20cc441578
1.kepler2200 ui优化
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2 years ago |
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lixiang
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3f6c65223f
1.删除部分不需要插入数据库数据
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2 years ago |
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lixiang
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ad6fa7b5dc
1.添加chamber界面创建wafer，开关门功能
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2 years ago |
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lixiang
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cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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2 years ago |
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lixiang
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76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
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lixiang
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72ac29dac2
1.优化PMC Kepler2200A界面
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2 years ago |
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lixiang
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4a6cf3aa4c
pm interlock报错修改
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2 years ago |
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lixiang
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b96ac701fb
1.添加TM Simulator
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2 years ago |
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lixiang
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4ffafb6001
EFEM界面优化
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2 years ago |
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lixiang
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179f80c29a
1.endpoint by wcf 添加修改配置文件界面
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2 years ago |
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lixiang
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f3bd6b016b
添加部分efem功能
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2 years ago |
 sangwq
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aaf8372896
兼容 两种 endpoint, 未完成
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2 years ago |
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sangwq
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16f00701e5
Redesign Recipe module.
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2 years ago |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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lixiang
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a64bed3d6c
1.Run recipe 功能现场修改
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2 years ago |
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lixiang
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c060fde154
1.Recipe Edit 添加配置功能
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2 years ago |
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sangwq
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c3154ba629
wafer manager.
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2 years ago |
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sangwq
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4e8a55f733
Endpoint Module.
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2 years ago |
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sangwq
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3222fa143a
Process module and Interlock .
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2 years ago |
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sangwq
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d8e5f1dc2c
2022 last update
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2 years ago |
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sangwq
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0050803370
update process Module
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2 years ago |
