 hecl
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e2836bfbda
1.Chamber DE process enhance
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11 月之前 |
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hecl
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80bbf51f03
Fix Venus SE transfer bus
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11 月之前 |
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hecl
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 月之前 |
 zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 月之前 |
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zhouhr
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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11 月之前 |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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11 月之前 |
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zhouhr
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5836f3ed1c
fix bugs in ShareDrive && add Online in SETM
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1 年之前 |
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hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 年之前 |
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hecl
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e1a8bb6663
1.remove SETM mbar to mtor
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1 年之前 |
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hecl
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d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
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1 年之前 |
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zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 年之前 |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 年之前 |
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zhouhr
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9d9b666ea4
Venus SE Update
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1 年之前 |
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zhouhr
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8436daeb68
Eliminate SE generation warning.
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1 年之前 |
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zhouhr
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e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
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1 年之前 |
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zhouhr
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 年之前 |
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zhouhr
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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1 年之前 |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 年之前 |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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1 年之前 |
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zhouhr
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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1 年之前 |
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zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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1 年之前 |
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zhouhr
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1c44773767
Add missing files
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1 年之前 |
