 lixiang
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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lixiang
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ef3841f212
atm模式移除PM控压
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1 year ago |
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lixiang
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bdec2c0d74
1.修改TM robot模拟器
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2 years ago |
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lixiang
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dbf06a2134
添加TM Operation界面
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2 years ago |
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lixiang
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 years ago |
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lixiang
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3a078d515d
1.修复ui灯闪烁错误bug
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2 years ago |
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lixiang
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7fe847dfd8
1.分开Venus/Kepler OverView界面，之前公用一个Overview界面
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2 years ago |
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lixiang
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d3c29df415
Venus修复传片bug
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2 years ago |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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lixiang
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280432bb82
1.TM传片动画制作，UI界面优化
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2 years ago |
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lixiang
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62f1a16025
1.添加PartialPressure界面
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2 years ago |
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lixiang
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e867b47d0c
1.添加VAT VATPerformance和PartialPressure界面及数据对比图标
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2 years ago |
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lixiang
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b6c2517c51
1.添加加热功能
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2 years ago |
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lixiang
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60d08c1285
1.ui与rt联动功能添加
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2 years ago |
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lixiang
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bad994820a
添加PM与部分loadlock与rt交互功能
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2 years ago |
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lixiang
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f3ae3aeca8
添加recipe添加修改界面
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2 years ago |
