 Intern01
|
171eef8acc
Add to chart@@to slot switch page function
|
2 years ago |
 lixiang
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
2 years ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
2 years ago |
 sangwq
|
d22b60372f
Debug devices on tools
|
2 years ago |
|
lixiang
|
ffda76b488
修改rt与ui交互功能
|
2 years ago |
|
sangwq
|
3f8df8cade
DEVICE UPDATE
|
2 years ago |
|
sangwq
|
3222fa143a
Process module and Interlock .
|
2 years ago |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 years ago |
|
sangwq
|
8565810192
Servo Pressure and Gas Flow done.
|
2 years ago |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 years ago |
|
sangwq
|
c8cfb4008d
check in HV, PendulumValve, TurboPump drivers.
|
3 years ago |
