 kuangzl
|
eaf2ce039b
Added PMChamberLabel display for VenusDE and VenusSE.
|
10 月之前 |
|
kuangzl
|
7631216206
Improve the animation of SE Robot, modify Venus SE UI, complete casette load animation.
|
10 月之前 |
 zhouhr
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
10 月之前 |
|
zhouhr
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
|
11 月之前 |
 hecl
|
f501000473
1.Fix Tru RF/match bugs
|
1 年之前 |
|
hecl
|
0a8ce7454b
Fix exception caused by SeTMView,SETMOperationView
|
1 年之前 |
|
zhouhr
|
5266d6e42b
fix the Chamber Pressure not show && Add CheckLoad Station to PA Position && fix CheckLoad cannot finish in Simulator.
|
1 年之前 |
|
zhouhr
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
|
1 年之前 |
|
zhouhr
|
9d9b666ea4
Venus SE Update
|
1 年之前 |
 intern02
|
d308f9a645
Improved TM Transfer and Robot Arm, updated and uploaded SeTMViewModel.cs、VenusSeOperationOverView.cs、HongHuVR.cs、SETMEntity.cs、Generic、SERobot.cs、SEMFPMRetractRoutine.cs、SEMFPMExtendRoutine.cs.
|
1 年之前 |
|
intern02
|
109e1ee3a2
Added SE Robot movement, updated and uploaded VenusSeOperationOverViewModel.cs, VenusSeOperationOverView.xaml, SERobot.cs, HongHuVR.cs, SETMEntity.cs, Generic, SERobot1.xaml, SERobot2.xaml .
|
1 年之前 |
|
zhouhr
|
c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
|
1 年之前 |
|
zhouhr
|
7fec2e1d8e
Enhance LOG Module && fix bug in SE UI.
|
1 年之前 |
|
zhouhr
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 年之前 |
|
zhouhr
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
|
1 年之前 |
|
zhouhr
|
cf4cf64edc
Optimize SEView.
|
1 年之前 |
|
zhouhr
|
a5ba0d3c6b
add Process in PMChamber for SEOpertaion
|
1 年之前 |
|
zhouhr
|
f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
|
1 年之前 |
|
zhouhr
|
724b0ca304
add ReturnWafer for Venus SE.
|
1 年之前 |
|
zhouhr
|
376ce10782
增加LOG模块中特定eEvent id触发委托函数 && 移除UI中触发PMError && add SE TM Cycle throughput && fix vcedoor not show
|
1 年之前 |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 年之前 |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
|
1 年之前 |
|
zhouhr
|
08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
|
1 年之前 |
|
zhouhr
|
b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
|
1 年之前 |
|
zhouhr
|
1c44773767
Add missing files
|
1 年之前 |
