 zhouhr
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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пре 1 година |
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zhouhr
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cc04adb731
change the location of the PA from VPA to Aligner1
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пре 1 година |
 sangwq
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2edb43d393
fix the crash issue.
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пре 1 година |
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zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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пре 1 година |
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zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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пре 1 година |
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zhouhr
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8436daeb68
Eliminate SE generation warning.
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пре 1 година |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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пре 2 година |
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zhouhr
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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пре 2 година |
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zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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пре 2 година |
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zhouhr
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a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
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пре 2 година |
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zhouhr
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038e0b984a
1.Add LL pump preemptive lock
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пре 2 година |
