 sangwq
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c8e945317e
develop Pre/Post Clean functionalities.
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11 月之前 |
 hecl
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80bbf51f03
Fix Venus SE transfer bus
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11 月之前 |
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hecl
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 月之前 |
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sangwq
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5b6817486a
enhance Venus dispatcher module.
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11 月之前 |
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sangwq
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98c6162bf2
fix the atm cycle bug.
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11 月之前 |
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sangwq
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7bf784cc5a
New routing algorithm for Venus SE/DE system.
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11 月之前 |
 zhouhr
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7b69f42c04
fix the bug in DE-ReadyForPickStatus
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11 月之前 |
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zhouhr
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2e70549fc8
fix bug in StationNumber(Aligner1)
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11 月之前 |
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zhouhr
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6e3aa49351
fix bug in SEMFPlaceRoutine
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11 月之前 |
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zhouhr
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632f566bc6
fix bug in SEMFSwapRoutine
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11 月之前 |
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zhouhr
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6cd541ac40
fix the bug in SE Pick/Place Routine
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11 月之前 |
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zhouhr
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cc04adb731
change the location of the PA from VPA to Aligner1
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11 月之前 |
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zhouhr
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1f725dcb61
fix bug in VCE2LP
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11 月之前 |
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zhouhr
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d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
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11 月之前 |
 lixiang
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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1 年之前 |
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sangwq
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2edb43d393
fix the crash issue.
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1 年之前 |
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sangwq
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f8336dc16b
fix the crash issue in SETMScheduler.
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1 年之前 |
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sangwq
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bcbd783654
avoid crash issue for temporary fix.
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1 年之前 |
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sangwq
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75b6c4548e
submit new venus routing algorithm.
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1 年之前 |
|
lixiang
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464c53cd94
1.Datalog添加高温Haeter开关显示
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1 年之前 |
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zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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1 年之前 |
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lixiang
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34958e5963
swap 压差计算log测试
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1 年之前 |
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lixiang
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d938a9e54c
PM/TM swap pick 开门前加压力wait
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1 年之前 |
|
lixiang
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9e9459c927
efem界面按钮功能优化
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1 年之前 |
|
lixiang
|
5a4c70257b
1.Recipe 添加给eap recipe的内容
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1 年之前 |
|
lixiang
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c671c999c0
ui界面优化
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1 年之前 |
|
lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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1 年之前 |
|
hecl
|
0f361d7301
1.Fix SETM robot ArmExtend bugs
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1 年之前 |
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sangwq
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1ff7394c30
Fix the ATM cycle blocking bug.
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1 年之前 |
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sangwq
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03770198be
Skip auto Vent/pump while ATM mode.
|
1 年之前 |
