 lixiang
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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1 year ago |
 sangwq
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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1 year ago |
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sangwq
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75314148f5
Added Auto Pump/vent option.
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1 year ago |
|
lixiang
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8fb1796c74
1.airsys chiller加入on/off状态
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1 year ago |
 zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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1 year ago |
|
lixiang
|
41d50f69e3
1.钟摆阀关闭，加入压力和位置自动设0功能
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1 year ago |
|
lixiang
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9e1de0e343
1.run recipe 参数bool改recipetype
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1 year ago |
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lixiang
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f0c8f8caa5
解决pm界面不能run recipe bug
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1 year ago |
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sangwq
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b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
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1 year ago |
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sangwq
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baeae1636e
TM Robot PreRotation function for particle and throughput issues.
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1 year ago |
|
sangwq
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09032ffa8c
implement throughput calculation function.
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1 year ago |
|
lixiang
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b5616b7378
解决冲突，合并代码
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1 year ago |
|
lixiang
|
cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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1 year ago |
|
lixiang
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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1 year ago |
|
lixiang
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708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
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1 year ago |
|
lixiang
|
cb91599d02
修复recipe Ui信息显示
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1 year ago |
|
lixiang
|
a5813eb09d
1.修改chamber wafer样式
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1 year ago |
|
lixiang
|
3a078d515d
1.修复ui灯闪烁错误bug
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1 year ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
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1 year ago |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
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1 year ago |
|
lixiang
|
c060fde154
1.Recipe Edit 添加配置功能
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1 year ago |
|
lixiang
|
796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
|
1 year ago |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
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1 year ago |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
|
2 years ago |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
|
2 years ago |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
2 years ago |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
|
2 years ago |
|
lixiang
|
b6c2517c51
1.添加加热功能
|
2 years ago |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
lixiang
|
7a6556869f
1.整理主界面UI
|
2 years ago |
