 hecl
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e1a8bb6663
1.remove SETM mbar to mtor
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hai 1 ano |
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hecl
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d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
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hai 1 ano |
 zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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hai 1 ano |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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hai 1 ano |
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zhouhr
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9d9b666ea4
Venus SE Update
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hai 1 ano |
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zhouhr
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8436daeb68
Eliminate SE generation warning.
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hai 1 ano |
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zhouhr
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e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
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hai 1 ano |
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zhouhr
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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hai 1 ano |
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zhouhr
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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hai 1 ano |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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hai 1 ano |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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hai 1 ano |
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zhouhr
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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hai 1 ano |
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zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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hai 1 ano |
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zhouhr
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1c44773767
Add missing files
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hai 1 ano |
