 sangwq
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c3ef1d5a6e
Wafer loadlock delay function.
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il y a 1 an |
 chenkui
|
a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
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il y a 1 an |
|
sangwq
|
4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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il y a 1 an |
|
sangwq
|
236244c8a0
redesign wtw clean function and fix auto vent bug.
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il y a 1 an |
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sangwq
|
b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
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il y a 1 an |
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sangwq
|
7d93bf0076
Job Clean function, not finished.
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il y a 1 an |
|
sangwq
|
9144014f90
enhance the routing algorithm and module online/offline control logic.
|
il y a 1 an |
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sangwq
|
d89a4c81f9
Enhance Routing algorithm and simulator configure file path.
|
il y a 1 an |
|
sangwq
|
9f239420d8
improve the efem code.
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il y a 1 an |
 yangdb
|
5987f80b26
1.增加sequence控件以及sequence内容编辑保存
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il y a 1 an |
|
sangwq
|
2b930e56b9
Log output for exception.
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il y a 2 ans |
 lixiang
|
896c7407de
优化log功能
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il y a 2 ans |
|
sangwq
|
56cd0ab611
add framework
|
il y a 2 ans |
