 zhouhr
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
|
1 year ago |
 lixiang
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 year ago |
|
lixiang
|
d744d950e1
配置文件添加Ethercat开关功能
|
1 year ago |
|
lixiang
|
ee26035034
1.添加Ethercat 励兆 Match DeviceData
|
1 year ago |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
zhouhr
|
8436daeb68
Eliminate SE generation warning.
|
1 year ago |
 sangwq
|
c5ba2fb197
Transfer align angel from sequence to system configure and enable angle increasement by wafer.
|
1 year ago |
|
lixiang
|
08e85396fc
1.添加eventview分页功能
|
1 year ago |
|
lixiang
|
5e8bf0ff14
1.重绘window窗体
|
1 year ago |
|
lixiang
|
038bcab52c
Operation界面添加PreCleanRecipe/PostCleanRecipe选择功能
|
1 year ago |
|
lixiang
|
5c995238da
1.修复kepler流气模拟器bug
|
1 year ago |
 chenkui
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 year ago |
|
zhouhr
|
c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
|
1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 year ago |
|
zhouhr
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 year ago |
|
lixiang
|
818383115c
UI优化
|
1 year ago |
|
zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
|
1 year ago |
|
lixiang
|
c0ff9f251e
1.添加kepler2200B
|
1 year ago |
|
zhouhr
|
36cc58e22c
fix bug in Venus SE PM in UI,RT,Simulator
|
1 year ago |
|
lixiang
|
e511d1f387
1.添加PM控压功能
|
1 year ago |
|
lixiang
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
1 year ago |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 year ago |
|
sangwq
|
d1ac5fa823
fixed the clean recipe path bug.
|
1 year ago |
|
sangwq
|
75314148f5
Added Auto Pump/vent option.
|
1 year ago |
|
lixiang
|
7d5d86217c
解决冲突
|
1 year ago |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
|
1 year ago |
|
lixiang
|
7a6912dc9c
添加cleanrecipe界面
|
1 year ago |
 hecl
|
58b65c3ff0
VenusSE Simulator PM Update
|
1 year ago |
|
zhouhr
|
08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
|
1 year ago |
