 lixiang
|
bad994820a
添加PM与部分loadlock与rt交互功能
|
2 years ago |
 sangwq
|
888ad3ea20
revolve conflict.
|
2 years ago |
|
sangwq
|
a244b205b9
Gas Flow and RF Power routine.
|
2 years ago |
|
lixiang
|
ccb4444fa8
添加部分ui按钮控制rt功能
|
2 years ago |
|
sangwq
|
c3154ba629
wafer manager.
|
2 years ago |
|
sangwq
|
3222fa143a
Process module and Interlock .
|
2 years ago |
|
sangwq
|
847220c6ce
update for initial recipe design
|
2 years ago |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 years ago |
|
sangwq
|
8565810192
Servo Pressure and Gas Flow done.
|
2 years ago |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 years ago |
|
sangwq
|
9760d40cf7
port simulator
|
2 years ago |
|
sangwq
|
53e362a33e
update
|
2 years ago |
