 lixiang
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79ffe0c064
1.分开Kepler与Venus SequenceView界面
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1 year ago |
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lixiang
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b67769ec2c
ui优化
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1 year ago |
 sangwq
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72419fe36a
enhance throughput and skip repeat loadlock pumping/venting.
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1 year ago |
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lixiang
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5ce110574e
1，添加cooling功能
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1 year ago |
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lixiang
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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1 year ago |
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lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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1 year ago |
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lixiang
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d33079596b
1.优化新版跑片动画
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1 year ago |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
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sangwq
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03063bae6a
Enhance the routine framework.
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2 years ago |
 zhouhr
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038e0b984a
1.Add LL pump preemptive lock
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2 years ago |
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sangwq
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f216c69fcf
Enhance AutoCycle Module.
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2 years ago |
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lixiang
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76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
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sangwq
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b8bd250b4e
TM/LL Pump/Vent/Purge done.
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2 years ago |
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sangwq
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241a8a2f5d
UPDATE 20230324
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2 years ago |
