 lixiang
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10c22069fe
1.添加EFEM光栅报警开关
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8 mēneši atpakaļ |
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lixiang
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a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
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8 mēneši atpakaļ |
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lixiang
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ca702b093b
1.alarm List 收集到300+条，并添加到程序里
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9 mēneši atpakaļ |
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lixiang
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e29f6e8e46
1.优化UI界面性能
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10 mēneši atpakaļ |
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lixiang
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79ffe0c064
1.分开Kepler与Venus SequenceView界面
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10 mēneši atpakaļ |
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lixiang
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b67769ec2c
ui优化
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11 mēneši atpakaļ |
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lixiang
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65d80057c2
ui优化
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11 mēneši atpakaļ |
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lixiang
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99d939492e
1.加登出界面
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11 mēneši atpakaļ |
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lixiang
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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1 gadu atpakaļ |
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lixiang
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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1 gadu atpakaļ |
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lixiang
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 gadu atpakaļ |
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lixiang
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d35b997884
1.优化RevtechMatch状态机
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1 gadu atpakaļ |
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lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 gadu atpakaļ |
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lixiang
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 gadu atpakaļ |
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lixiang
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af631c4aaa
1.添加RF Calibration功能
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1 gadu atpakaļ |
|
lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 gadu atpakaļ |
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lixiang
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95f5be1ca4
1.修复iomfc writemode的合并冲突bug
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1 gadu atpakaļ |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 gadu atpakaļ |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 gadu atpakaļ |
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lixiang
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feed6f1c8e
修复手动流气bug
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1 gadu atpakaļ |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 gadu atpakaļ |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 gadu atpakaļ |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 gadu atpakaļ |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 gadu atpakaļ |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 gadu atpakaļ |
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lixiang
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020e8459ea
移除kepler2200A与Kepler2200B RT Device中的chiller
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1 gadu atpakaļ |
|
lixiang
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fdb9fa780e
修复PM界面钟摆阀与加热可以打开多个窗体的bug
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1 gadu atpakaļ |
|
lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 gadu atpakaļ |
|
lixiang
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818383115c
UI优化
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1 gadu atpakaļ |
|
lixiang
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c0ff9f251e
1.添加kepler2200B
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1 gadu atpakaļ |
