Commit History

Author SHA1 Message Date
  lixiang 1929a3510b 1.新版ui界面开发 1 year ago
  lixiang 7ff42d4eca 1.添加 Process 切换step Match/BiasMatch设置值 offset功能,c1/c2小于offset不设置 1 year ago
  lixiang 6d6f659b77 1.Kepler2200 TM/PM控大压力10Pa,添加工艺结束,等待压力稳定(TM/PM压差满足要求)TM再Pick功能 1 year ago
  lixiang 2d424f4cab 优化漏气检测算法,给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能 1 year ago
  sangwq 8565810192 Servo Pressure and Gas Flow done. 2 years ago