Commit History

Author SHA1 Message Date
  sangwq 03063bae6a Enhance the routine framework. 1 year ago
  sangwq 8020492bf4 fix action list buffer not reset while swap wafer. 1 year ago
  sangwq a88d0012df fix some AutoCycle/manualMove/ReturnWafer/Abort bugs. 1 year ago
  sangwq 8f9b95ae8f Develop transfer cycle. 1 year ago
  sangwq 5fc13b3f0c New Efem design 1 year ago