 lixiang
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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il y a 11 mois |
 zhouhr
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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il y a 1 an |
 sangwq
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98c6162bf2
fix the atm cycle bug.
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il y a 1 an |
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zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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il y a 1 an |
 hecl
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f814cf53a8
1.Add simulator read RF ConfigType function
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il y a 1 an |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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il y a 1 an |
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hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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il y a 1 an |
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hecl
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d15749f5b1
1.fix VenusSE show chiler temp bugs
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il y a 1 an |
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lixiang
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c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
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il y a 1 an |
