 lixiang
|
ced69ea3b9
新版本Recioeview界面开发
|
1 year ago |
|
lixiang
|
652daaa81a
cycle uncheck bug修复
|
1 year ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
1 year ago |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
1 year ago |
|
lixiang
|
2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
|
1 year ago |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
1 year ago |
|
lixiang
|
9163903164
Kepler2200优化
|
1 year ago |
|
lixiang
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
1 year ago |
|
lixiang
|
464c53cd94
1.Datalog添加高温Haeter开关显示
|
1 year ago |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
1 year ago |
 hecl
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
1 year ago |
|
lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
|
1 year ago |
|
lixiang
|
01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
|
1 year ago |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 year ago |
|
lixiang
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
|
1 year ago |
|
hecl
|
8b0b067448
Add chamber ISO valve status
|
1 year ago |
|
lixiang
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
1 year ago |
|
lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
1 year ago |
|
lixiang
|
af631c4aaa
1.添加RF Calibration功能
|
1 year ago |
|
lixiang
|
e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
|
1 year ago |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 year ago |
|
lixiang
|
8cea3a0063
修复流气tolerance bug
|
1 year ago |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
1 year ago |
|
lixiang
|
020e8459ea
移除kepler2200A与Kepler2200B RT Device中的chiller
|
1 year ago |
|
lixiang
|
15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
|
1 year ago |
|
lixiang
|
967f6b6b9c
添加控压结束，保持一秒流气功能
|
1 year ago |
