 sangwq
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aaf8372896
兼容 两种 endpoint, 未完成
|
1 year ago |
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sangwq
|
16f00701e5
Redesign Recipe module.
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1 year ago |
 lixiang
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de406b964e
1.添加EFEM等ui界面
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1 year ago |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
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1 year ago |
|
lixiang
|
c060fde154
1.Recipe Edit 添加配置功能
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1 year ago |
|
sangwq
|
c3154ba629
wafer manager.
|
2 years ago |
|
sangwq
|
4e8a55f733
Endpoint Module.
|
2 years ago |
|
sangwq
|
3222fa143a
Process module and Interlock .
|
2 years ago |
|
sangwq
|
d8e5f1dc2c
2022 last update
|
2 years ago |
|
sangwq
|
0050803370
update process Module
|
2 years ago |
