 lixiang
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62f1a16025
1.添加PartialPressure界面
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2 years ago |
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lixiang
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b6c2517c51
1.添加加热功能
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2 years ago |
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lixiang
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7fa6f384dd
UI界面修改，将bottomview中button换成自定义togglebutton
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2 years ago |
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lixiang
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7c817b8450
将钟摆阀最大值设到1000
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2 years ago |
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lixiang
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ffda76b488
修改rt与ui交互功能
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2 years ago |
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lixiang
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60d08c1285
1.ui与rt联动功能添加
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2 years ago |
 sangwq
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3222fa143a
Process module and Interlock .
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2 years ago |
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sangwq
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d8e5f1dc2c
2022 last update
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2 years ago |
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sangwq
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630c7b7548
Wafer transfer routine done.
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2 years ago |
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sangwq
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8565810192
Servo Pressure and Gas Flow done.
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2 years ago |
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sangwq
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 years ago |
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sangwq
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3f9c41937a
update for event module enhancement
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3 years ago |
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sangwq
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53e362a33e
update
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3 years ago |
