 lixiang
|
6447434c5b
Venus代码删除
|
месяцев назад: 7 |
|
lixiang
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
месяцев назад: 9 |
 zhouhr
|
ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.
|
месяцев назад: 9 |
 sangwq
|
09e8c5db30
Fix the post clean not running bug.
|
1 год назад |
|
zhouhr
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
1 год назад |
|
sangwq
|
7bf784cc5a
New routing algorithm for Venus SE/DE system.
|
1 год назад |
|
sangwq
|
e61f018b66
Manual Return wafer while running cycle.
|
1 год назад |
|
sangwq
|
b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
|
1 год назад |
|
sangwq
|
9144014f90
enhance the routing algorithm and module online/offline control logic.
|
1 год назад |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
лет назад: 2 |
