提交历史

作者 SHA1 备注 提交日期
  zhouhr 253fcb8be2 add CassetteArrive,CurrentSlot in UI,RT,Simulator 10 月之前
  zhouhr 0bea20360b add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM 11 月之前
  zhouhr 9b93f58d68 Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM 11 月之前
  zhouhr 13460815b8 add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI 11 月之前
  hecl c332b95d39 venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function 1 年之前
  hecl d0f35564a3 1.Venus SE VCE&TM change to Single signal mode(NO VAC signal) 1 年之前
  zhouhr c80e520ac1 update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine 1 年之前
  zhouhr 0728fdc25a Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View 1 年之前
  zhouhr f5a709d29f enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM 1 年之前
  zhouhr 31bbc4482b update ui && rt && simu for Venus SE 1 年之前