 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 年之前 |
 zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 年之前 |
|
zhouhr
|
9d9b666ea4
Venus SE Update
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1 年之前 |
|
zhouhr
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dc38e4a4a8
fix bug in Venus SE Swap
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1 年之前 |
|
zhouhr
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26a6aa8f41
fix bug in SE Swap && SE Cycle
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1 年之前 |
 intern02
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0dfd2f80f0
add VCE view in UI && add currentSlot for VceEntity while GotoSlot over && fix bug of SE SwapRoutine.
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1 年之前 |
|
zhouhr
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a83b38ac11
Add SE VCE|TM FsmState in TopView && Fix bug of CycledWafer number in SE Cycle && Add VCE Goto slot in SwapRoutine
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1 年之前 |
|
zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 年之前 |
