 lixiang
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 year ago |
 zhouhr
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12fa756895
1. SETM will be Init while While SETM Abort Homing
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1 year ago |
|
lixiang
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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1 year ago |
 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
|
lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
|
hecl
|
e1a8bb6663
1.remove SETM mbar to mtor
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1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
|
zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
|
zhouhr
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 year ago |
|
zhouhr
|
9d9b666ea4
Venus SE Update
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1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
|
hecl
|
e2c4a51efe
1.Add VenusDE JetVenusDEPM control
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1 year ago |
|
zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
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1 year ago |
|
hecl
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1b4faf274b
Improve VenusSE pm viewmodel and vent function
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1 year ago |
|
zhouhr
|
e8e04e07b5
Change cast way by Enum Name for SEPMView.
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1 year ago |
|
zhouhr
|
36cc58e22c
fix bug in Venus SE PM in UI,RT,Simulator
|
1 year ago |
|
hecl
|
b277487716
1.Venuse PM Viewmodel update
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1 year ago |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
|
1 year ago |
