 chenkui
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9c5f7f760b
修复LP.State状态取至IsLoaded
|
7 months ago |
|
chenkui
|
665c6d15f7
增加了Loadport AccessModel和State
|
7 months ago |
 lixiang
|
8e660cd7a8
1.去除carrierid ;字符
|
7 months ago |
|
lixiang
|
d6b8d32004
1.修复不能跑atm模式的bug
|
7 months ago |
 zhouhr
|
0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
|
11 months ago |
 sangwq
|
7a1faeac74
Redesign the EFEM module for thread safe issue.
|
11 months ago |
|
chenkui
|
2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
|
1 year ago |
|
chenkui
|
63d58afa42
1、SecsGem增加了UTF-8编码的支持；
|
1 year ago |
|
chenkui
|
c5f00f1310
1、增加了Unload complete后的FA事件通知
|
1 year ago |
|
chenkui
|
a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
|
1 year ago |
|
chenkui
|
8bb5f3f4f9
fixed loadport event notify;
|
1 year ago |
|
chenkui
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 year ago |
 Intern01
|
60e9a04892
Simulator LP3 Update
|
1 year ago |
|
lixiang
|
2cc409c5f8
合并代码
|
1 year ago |
|
sangwq
|
c9282deeeb
EFEM Driver and simulator functions.
|
1 year ago |
|
sangwq
|
16f00701e5
Redesign Recipe module.
|
1 year ago |
|
sangwq
|
f211c4242f
Efem module raw design.
|
1 year ago |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
