 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
 zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 year ago |
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zhouhr
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e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
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1 year ago |
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zhouhr
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 year ago |
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zhouhr
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 year ago |
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zhouhr
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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1 year ago |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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2 years ago |
