 lixiang
|
e00ff4f30d
1.高温Heater position1-position5加上动画
|
1 year ago |
|
lixiang
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
1 year ago |
|
lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
|
1 year ago |
|
lixiang
|
af631c4aaa
1.添加RF Calibration功能
|
1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
1 year ago |
|
lixiang
|
95f5be1ca4
1.修复iomfc writemode的合并冲突bug
|
1 year ago |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 year ago |
|
lixiang
|
feed6f1c8e
修复手动流气bug
|
1 year ago |
|
lixiang
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 year ago |
|
lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 year ago |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
1 year ago |
|
lixiang
|
020e8459ea
移除kepler2200A与Kepler2200B RT Device中的chiller
|
1 year ago |
|
lixiang
|
fdb9fa780e
修复PM界面钟摆阀与加热可以打开多个窗体的bug
|
1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 year ago |
|
lixiang
|
818383115c
UI优化
|
1 year ago |
|
lixiang
|
c0ff9f251e
1.添加kepler2200B
|
1 year ago |
