 chenkui
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7dc2089ceb
1、add PortWaferStart/PortWaferEnd event sequence name parameter;
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1 year ago |
 lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
|
lixiang
|
ef3841f212
atm模式移除PM控压
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1 year ago |
|
chenkui
|
c49311bc46
EventItem default construction parameter id is 1029;
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1 year ago |
|
chenkui
|
44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
 Intern01
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23c59d3c86
1.完成FA模块的功能开发
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2 years ago |
|
Intern01
|
8a99234204
1.增加prcocessdatahistory 页面GridSplitter，excel导出等功能，增加FA界面
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2 years ago |
