 zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 anno fa |
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zhouhr
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 anno fa |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 anno fa |
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zhouhr
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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1 anno fa |
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zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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1 anno fa |
