 sangwq
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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1 year ago |
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sangwq
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236244c8a0
redesign wtw clean function and fix auto vent bug.
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1 year ago |
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sangwq
|
b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
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2 years ago |
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sangwq
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7d93bf0076
Job Clean function, not finished.
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2 years ago |
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sangwq
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9144014f90
enhance the routing algorithm and module online/offline control logic.
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2 years ago |
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sangwq
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d89a4c81f9
Enhance Routing algorithm and simulator configure file path.
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2 years ago |
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sangwq
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9f239420d8
improve the efem code.
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2 years ago |
 yangdb
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5987f80b26
1.增加sequence控件以及sequence内容编辑保存
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2 years ago |
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sangwq
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2b930e56b9
Log output for exception.
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2 years ago |
 lixiang
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896c7407de
优化log功能
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3 years ago |
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sangwq
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56cd0ab611
add framework
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3 years ago |
