 zhouhr
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5266d6e42b
fix the Chamber Pressure not show && Add CheckLoad Station to PA Position && fix CheckLoad cannot finish in Simulator.
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1 year ago |
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zhouhr
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75fc0c642e
update TMROBot,VCE Simulator
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1 year ago |
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zhouhr
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a84b9b9f89
add CheckLoad in HongHuVR a&& add TMRobot Home for SE
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1 year ago |
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zhouhr
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9094188c54
add CheckLoad in HongHuVR && fix the bug in seRobot
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1 year ago |
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zhouhr
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c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
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1 year ago |
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zhouhr
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 year ago |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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2 years ago |
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zhouhr
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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2 years ago |
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zhouhr
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1c44773767
Add missing files
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2 years ago |
