 zhouhr
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12fa756895
1. SETM will be Init while While SETM Abort Homing
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1 年間 前 |
 hecl
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d15749f5b1
1.fix VenusSE show chiler temp bugs
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1 年間 前 |
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hecl
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2ffdf6e535
1Venus DE LinerDoor update
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1 年間 前 |
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hecl
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d331213da1
1.SETM Pressure Control update
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1 年間 前 |
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zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 年間 前 |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 年間 前 |
 intern02
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d308f9a645
Improved TM Transfer and Robot Arm, updated and uploaded SeTMViewModel.cs、VenusSeOperationOverView.cs、HongHuVR.cs、SETMEntity.cs、Generic、SERobot.cs、SEMFPMRetractRoutine.cs、SEMFPMExtendRoutine.cs.
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1 年間 前 |
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intern02
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109e1ee3a2
Added SE Robot movement, updated and uploaded VenusSeOperationOverViewModel.cs, VenusSeOperationOverView.xaml, SERobot.cs, HongHuVR.cs, SETMEntity.cs, Generic, SERobot1.xaml, SERobot2.xaml .
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1 年間 前 |
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zhouhr
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 年間 前 |
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zhouhr
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 年間 前 |
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zhouhr
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a83b38ac11
Add SE VCE|TM FsmState in TopView && Fix bug of CycledWafer number in SE Cycle && Add VCE Goto slot in SwapRoutine
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1 年間 前 |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 年間 前 |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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1 年間 前 |
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zhouhr
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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1 年間 前 |
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zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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1 年間 前 |
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zhouhr
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1c44773767
Add missing files
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1 年間 前 |
