 sangwq
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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hai 1 ano |
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sangwq
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2de3872723
duplicated wafer function.
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hai 1 ano |
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sangwq
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52349cad2b
Duplicated wafer functions.
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hai 1 ano |
 lixiang
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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hai 1 ano |
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sangwq
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e8ae7ee302
fix the Loadlock path bug while fixed slot mode.
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hai 1 ano |
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sangwq
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408e8f0786
enhance the throughput while loadlock is fixed slot pattern.
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hai 1 ano |
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sangwq
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89d1b63b12
fix the bug which missing calling RouteTo on Vac side.
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hai 1 ano |
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sangwq
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9cdf232cb1
Fix the routing bug for fixed slot Loadlock.
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hai 1 ano |
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sangwq
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b11dfcec1e
Load configure value for Loadlock slot in out option.
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hai 1 ano |
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sangwq
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a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
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hai 1 ano |
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lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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hai 1 ano |
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sangwq
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210098481b
fix the routing bug which missing calling RouteTo().
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hai 1 ano |
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sangwq
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b85b9aa79f
fix some routing bugs.
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hai 1 ano |
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lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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hai 1 ano |
 chenkui
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d4a031af0e
1、change PortWaferstart/PortWaferEnd event to WaferArrived/WaferLeved event
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hai 1 ano |
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chenkui
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563a30f852
1、add recipe event notify;
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hai 1 ano |
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sangwq
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3cb931b12b
fix the routing bug while multiple In Out pattern sequence, and the bug for return all wafer.
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hai 1 ano |
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sangwq
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709c7a1c10
fixed the routing bug while B In B Out.
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hai 1 ano |
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sangwq
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614fe9104b
Transfer PM wafer while PMTask status not update to idle.
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hai 1 ano |
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sangwq
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78ec8de62c
fix the bug which pm wafer been transfer out without processed.
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hai 1 ano |
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sangwq
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6d393bb86d
new routing algorithm with prediction.
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hai 1 ano |
|
chenkui
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63d58afa42
1、SecsGem增加了UTF-8编码的支持；
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hai 1 ano |
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sangwq
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9189e1b51f
new routing algorithm update.
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hai 1 ano |
|
chenkui
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5740a76224
1、ControlJobInfo类增加了SequenceNameList,解决LoadPort UI中Sequence显示问题
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hai 1 ano |
|
chenkui
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5cf3c54d79
1、RouteManager增加了StopJob,AbortJob等
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hai 1 ano |
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sangwq
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c3ef1d5a6e
Wafer loadlock delay function.
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hai 1 ano |
|
chenkui
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a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
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hai 1 ano |
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sangwq
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db34e04302
missing SystemDispatcher.cs
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hai 1 ano |
