 zhouhr
|
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
|
11 months ago |
 chenkui
|
63d58afa42
1、SecsGem增加了UTF-8编码的支持；
|
1 year ago |
 sangwq
|
c3ef1d5a6e
Wafer loadlock delay function.
|
1 year ago |
|
chenkui
|
a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
|
1 year ago |
|
sangwq
|
4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
|
1 year ago |
|
sangwq
|
236244c8a0
redesign wtw clean function and fix auto vent bug.
|
1 year ago |
|
sangwq
|
b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
|
1 year ago |
|
sangwq
|
7d93bf0076
Job Clean function, not finished.
|
1 year ago |
|
sangwq
|
9144014f90
enhance the routing algorithm and module online/offline control logic.
|
1 year ago |
|
sangwq
|
d89a4c81f9
Enhance Routing algorithm and simulator configure file path.
|
1 year ago |
|
sangwq
|
9f239420d8
improve the efem code.
|
1 year ago |
 yangdb
|
5987f80b26
1.增加sequence控件以及sequence内容编辑保存
|
1 year ago |
|
sangwq
|
2b930e56b9
Log output for exception.
|
2 years ago |
 lixiang
|
896c7407de
优化log功能
|
2 years ago |
|
sangwq
|
56cd0ab611
add framework
|
2 years ago |
