 zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
 lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
|
lixiang
|
5e8bf0ff14
1.重绘window窗体
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1 year ago |
|
zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
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1 year ago |
 sangwq
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03063bae6a
Enhance the routine framework.
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1 year ago |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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1 year ago |
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sangwq
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d22b60372f
Debug devices on tools
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2 years ago |
|
lixiang
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ffda76b488
修改rt与ui交互功能
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2 years ago |
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sangwq
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bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
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2 years ago |
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sangwq
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a244b205b9
Gas Flow and RF Power routine.
|
2 years ago |
