 lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
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lixiang
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 year ago |
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lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
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lixiang
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d8b75084d0
添加RT UI 模块选择功能
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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lixiang
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c0ff9f251e
1.添加kepler2200B
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1 year ago |
