 lixiang
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5888197193
1.efem 添加 foup load/unload动画
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2 years ago |
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lixiang
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afb706578a
添加CycleCount/WaferCount显示
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2 years ago |
 Intern01
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60e9a04892
Simulator LP3 Update
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2 years ago |
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lixiang
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708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
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2 years ago |
 zhouhr
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1408b6822f
增加return wafer的Dialog、右键wafer的菜单项return wafer
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2 years ago |
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zhouhr
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f56f80e34a
完善UI 拖片 LP的job显示效果、传参 修改Robot槽位显示效果 TM数据绑定 return wafer等
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2 years ago |
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lixiang
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b6acfe2e29
优化TM leak check功能
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2 years ago |
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lixiang
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72ac29dac2
1.优化PMC Kepler2200A界面
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2 years ago |
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lixiang
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edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
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2 years ago |
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lixiang
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2cc409c5f8
合并代码
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2 years ago |
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lixiang
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85fc03f838
1.添加部分OpertionOverView ui功能
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2 years ago |
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lixiang
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179f80c29a
1.endpoint by wcf 添加修改配置文件界面
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2 years ago |
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lixiang
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f3bd6b016b
添加部分efem功能
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2 years ago |
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lixiang
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a8582aeee2
修复配置文件不能修改bug
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2 years ago |
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lixiang
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bdec2c0d74
1.修改TM robot模拟器
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2 years ago |
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lixiang
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be22c5112d
TM 添加两个pump 串口23/24/25/26
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2 years ago |
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lixiang
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dbf06a2134
添加TM Operation界面
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2 years ago |
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lixiang
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a5813eb09d
1.修改chamber wafer样式
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2 years ago |
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lixiang
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 years ago |
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lixiang
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3a078d515d
1.修复ui灯闪烁错误bug
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2 years ago |
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lixiang
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6dd42b5fb0
添加process数据分析功能
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2 years ago |
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lixiang
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d3c29df415
Venus修复传片bug
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2 years ago |
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lixiang
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530ddcbae7
优化topview界面
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2 years ago |
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lixiang
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9231cab4b9
1.修改topView ui
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2 years ago |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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lixiang
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a48b743e88
1.完成PartialPressure功能
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2 years ago |
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lixiang
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b6c2517c51
1.添加加热功能
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2 years ago |
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lixiang
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93a863cbc0
overView流气功能提交
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2 years ago |
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lixiang
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081ab4daa5
添加多个UI界面
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2 years ago |
