 zhouhr
|
9e1a79673e
1. add the item of AutoUnLoad for Job
|
пре 5 месеци |
 hecl
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
|
пре 1 година |
|
zhouhr
|
5266d6e42b
fix the Chamber Pressure not show && Add CheckLoad Station to PA Position && fix CheckLoad cannot finish in Simulator.
|
пре 1 година |
|
zhouhr
|
75fc0c642e
update TMROBot,VCE Simulator
|
пре 1 година |
|
zhouhr
|
a84b9b9f89
add CheckLoad in HongHuVR a&& add TMRobot Home for SE
|
пре 1 година |
|
zhouhr
|
9094188c54
add CheckLoad in HongHuVR && fix the bug in seRobot
|
пре 1 година |
|
zhouhr
|
c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
|
пре 1 година |
|
zhouhr
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
|
пре 1 година |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
пре 1 година |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
|
пре 1 година |
|
zhouhr
|
08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
|
пре 1 година |
|
zhouhr
|
1c44773767
Add missing files
|
пре 1 година |
