 lixiang
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031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
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vor 2 Monaten |
 zhouhr
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b6309f712c
upload for Venus SE/DE
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vor 5 Monaten |
|
zhouhr
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
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vor 8 Monaten |
|
zhouhr
|
7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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vor 9 Monaten |
|
zhouhr
|
a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
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vor 11 Monaten |
|
zhouhr
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cc436f1ac6
add DE shareChiller && add check items before PM Pump down.
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vor 11 Monaten |
|
zhouhr
|
273e8dcfae
fix bug in ShareChiller.
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vor 11 Monaten |
|
zhouhr
|
41c5b8a615
Remove the toleranceChecker in SMCChiler && SMCShareChiller
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vor 1 Jahr |
|
zhouhr
|
93fd866dbe
update SMCChillerDrive && SMCShareChiller
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vor 1 Jahr |
